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Research on spectroscopic ellipsometry in China with future challenges

Chu Li,Hua-Tian Tu,Yu-Xiang Zheng,Song-You Wang,Rong-Jun Zhang,Hai-Bin Zhao,Yue-Mei Yang,Liang-Yao Chen

Thin Solid Films（2023）

Cited 1|Views10
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Abstract
•Brief review of the history of SE research and development in China.•Exploration of future challenges to tackle by the SE community.•The new configurations of DRC-MMIE and high speed SE system without mechanic moving parts in parallel mode are presented.
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Spectroscopic ellipsometry,Optical properties,Micro/nanostructures
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