Calibration of polarization effects for the focusing lens pair in a micro-spot Mueller matrix ellipsometer

Jiamin Liu,Zhou Jiang,Song Zhang,Tao Huang,Hao Jiang,Shiyuan Liu

Thin Solid Films（2023）

引用 1|浏览19

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摘要

•A parametric polarization model has been proposed to describe the focusing lens pair.•A comprehensive calibration method for the polarization effects of lens pair was proposed.•The method improve the measured SiO2 film thickness deviations to within 1.6%.

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关键词

Polarization effects,In-situ calibration,Mueller matrix decomposition,Focusing lens pair,Micro-spot mueller matrix ellipsometer,Thickness measurement

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