Pulsed laser deposition of epitaxial films: : phase-field description

The pulsed laser deposition (PLD) of oxide films is considered as decomposition of a highly supersaturated surface solution of adatoms. The phase-field approach is employed for the process description. Results of the modelling are compared with the in-situ reflection high-energy electron diffraction of the strontium titanate (STO) epitaxial films, growing under the PLD.