Analysis of the Transfer Curve and the Center of Rotation of Elastic Micro-Positioning Module with Optimized Butterfly Flexures

Micro and Nano-technologies are demanding measurement positioning systems for rotational motions that can cover the requirements for high accuracy, maintenance-free operation and application in different environments with low technical cleanliness or large range of working temperatures. One of the main accuracy parameters is the deviation of the center of rotation during operation. This paper presents the results of the study of the influence on the accuracy caused by different external forces that can be applied to the developed elastic micro-position measuring system in the application.