Nano-twins and stacking faults induced by picosecond laser dicing with low fluence strengthening monocrystalline silicon
Materials Letters（2023）
摘要
•25 μm silicon wafers were cut through by picosecond laser with different fluences.•The enhancement effect at low fluence was investigated.•Numerous stacking faults and nano-twins were induced to strengthen the substrate.
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关键词
Fracture strength,Nano-twins,Stacking faults,Picosecond laser dicing,Fluence
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