Development of single photon avalanche detectors for NIR light detection

Abstract Near-infrared (NIR) light is used in several non-invasive biomedical techniques to measure the blood flow in deep tissues. The BIOSPAD project targets the development of SPAD arrays specifically designed for Diffuse Correlation Spectroscopy (DCS) in the NIR to measure deep tissue microvascular blood flow. In the first stage of the project, single SPADs with multiplication layers buried at different depths have been designed at IFAE and produced in a 150 nm CMOS technology. In this study, we present results of the characterization of SPAD devices with an area of 50 × 50 µm2 operated with an external passive quenching circuit. We compared properties, such as Dark Count Rate (DCR) and Photon Detection Efficiency (PDE) of the different SPAD designs. The PDE for 780 nm light of SPADs with a buried multiplication layer was observed to be in the range of 10–20% with a DCR of the order of 2 kHz. The results of these first prototypes are promising and are being followed up by the development of a new generation of CMOS SPADs designed to further improve the NIR light response.