Magneto-Optical Properties of Multilayer Structures Based on Cobalt and Chromium-Group Metals for Magnetic Memory Elements
Russian Microelectronics(2022)
摘要
Cobalt-based magnetic structures with buffer layers of chromium-group metals are fabricated by magnetron sputtering and investigated. Scanning electron microscopy shows that Cr- and Mo-based structures have homogeneous surface morphology and W-based structures are inhomogeneous. X-ray diffraction shows that W film contains α- and β-phases. Film thicknesses are determined using X-ray reflectometry. Magneto-optical measurements reveal in-plane magnetic anisotropy in the Co/Cr and Co/Mo systems and its absence in Co/W system. Perpendicular magnetic anisotropy is found and studied in multilayer structures based on cobalt and platinum. Physical parameters important for the fabrication of magnetic memory devices based on the studied systems are estimated.
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关键词
cobalt,thin films,magnetic memory,X-ray diffraction,X-ray reflectometry,magneto-optical Kerr effect,magnetic anisotropy,Dzyaloshinskii–Moriya interaction
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