Hollow cathode enhanced capacitively coupled plasmas in Ar/N-2/H-2 mixtures and implications for plasma enhanced (vol 40, 044002, 2022)David R. Boris,Michael J. Johnson,Charles R. Eddy Jr,Scott G. WaltonJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B（2022）引用 1|浏览9暂无评分AI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
