ABSOLUTE INTENSITIES OF HELIUM LINES AND SPACE RESOLVED ELECTRON DENSITIES AND ENERGIES IN DISCHARGE WITH A HOLLOW CATHODE IN HE:H2O GAS MIXTURE
High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes(2023)
Abstract
In a discharge with a hollow cathode the electron energy distribution functions (EEDFs), electron concentration, and absolute intensities of pure helium and helium mixtures with water vapor at pres-sures of 2-3 mbar were measured. It was shown that under the experiment conditions, the EEDFs were significantly different from the Maxwellian function since the amount of high-energy electrons in the energy range of 7-24 eV was much larger. As the concentration of water molecules in plasma increased, the amount of high-energy electrons decreased. The absolute intensities of a number of he-lium lines were calculated in coronal model approximation. It was determined that the lines reasonably agreed with the experimental measurements of the absolute intensities.
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Key words
Langmuir probe, electron energy distribution, hollow cathode, nonlocal kinetics
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