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Cryogenic Implantation to Boost PFET Performance and Reduce Variability in 3D NAND Flows

Jeng-Hwa Liao,Jung-Yu Hsieh,Ling-Wu Yang,Tahone Yang,Kuang-Chao Chen,Baonian Guo, Monica Hsiao, Shiryu Lee, Fenglin Wang, Sungho Jo, Kyuha Shim

MRS Advances（2022）

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