Low Temperature Parameters of Exchange Interaction of the Polycrystalline Layers in SOI-Structures

2022 IEEE 41st International Conference on Electronics and Nanotechnology (ELNANO)(2022)

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Abstract
The article deals with to the study of the peculiarities of charge carrier transfer in polycrystalline films of SOI-structures, doped with boron to concentrations corresponding to the metal-insulator transition. The magnetoresistance of polysilicon in SOI-structures under the action of magnetic fields up to 14 T at temperatures of 4.2 K was studied. A detailed analysis of the results of studies of the magnetic transport properties of poly-Si was performed. It is established that at low-temperature transfer of charge carriers in polycrystalline films there is a hopping conductivity, the parameters of which can be estimated by strong spin-orbit interaction within the framework of the theory of weak localization.
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Key words
polysilicon,silicon on insulator of structure,cryogenic temperature,spin-obit interaction
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