Design and Analysis of a Radio Frequency Based Non-Contact Type Micro Electromechanical Switch

Microelectromechanical switches are mostly used in cellular communication systems. These are reliable as compared to other semiconductor switches which include high resolution, small size, low power consumption and cost. Radio frequency microelectromechanical systems (RF-MEMS) based switches usually fabricate through electrothermal, electrostatic and piezoelectric actuation methods. In this paper, design and analysis of three state non-contact type RF-MEMS switch have been presented. The designed switch is free from micro-welding issues and a static fraction that occurs commonly in contact types of microsystem switches. The switch operation principle depends on the change in capacitance between ground lines and signal lines. The capacitance is adjusted by the electrostatic actuation mechanism. The freely movable ground lines work bidirectionally therefore switching can be achieved between OFF, ON, and deep OFF states. The low actuation voltage is obtained by designing a flexible spring and increasing the overlap area of actuation electrodes.