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Microdot for transverse mode control in VCSEL

Jiaxing Wang,Yipeng Ji,Zhuokai Yang, Huawen Hu,Fangzhou Li,Jianqiang Chen,ChihChiang Shen,Connie J. Chang-Hasnain

2022 Compound Semiconductor Week (CSW)（2022）

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Abstract
The VCSEL device with a SiN microdot of 2um in diameter and 120nm in thickness showed a very strong mode suppression of 20dB on the 0 th -order mode. The resulting spectral RMS was reduced significantly from 0.65nm to 0.47nm. Excellent PAM4 53Gbps eye diagram was obtained after 100-meter fiber transmission.
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Key words
VCSEL,data communication,micro-fabrication
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