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Novel Field-Plate Integrated Mesa-Type InGaAs/InP Avalanche Photodiode

2022 International Conference on IC Design and Technology (ICICDT)(2022)

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Abstract
For the first time, we proposed and investigated a field-plate (FP) integrated mesa-type InGaAs/InP avalanche photodiode (APD). The shallow-mesa structure helps to suppress the surface effect. At the same time, the FP can minimize the electric field crowding at the mesa edges to avoid the pre-mature breakdown, which could be realized via simple fabrication processes. The impact of FP's length, thickness, and material are considered and investigated by the Sentaurus TCAD simulation, where the effectiveness of our structure is confirmed.
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Key words
avalanche photodiode,field plate,TCAD simulation
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