Development Assembly Methods of the Micro-capillary Fill-tubes and Micro-capsule
2022 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)(2022)
摘要
Aiming at the problem of assembling Micro-capillary fill-tubes and Micro-capsule in inertial confinement fusion (ICF) target manufacturing, a Micro-assembly workstation is developed. Through the workstation, this paper proposes a new micro-assembly method depending on micro-assembly force, multi-microscopic vision, micromanipulator and time/pressure pL micro-bonding technology. In order to determine the relation between influence factors and micro-bonding spot, this paper carried out simulation modeling and analysis of time/ pressure bonding process. According to it, assembly experiment is successfully accomplished. The result shows the assembly method is very effective and meets the requirements of ICF target.
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关键词
micro-assembly,assembly force,micromanipulator,micro-bonding,multi-microscopic vision
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