Corrections to “A Temperature-Stable and Low Impedance Piezoelectric MEMS Resonator for Drop-in Replacement of Quartz Crystals” [Sep 21 1382-1385]
IEEE Electron Device Letters(2022)
摘要
In the above letter
[1]
, the authors would like to correct an error regarding the deduction of the unloaded quality factor (
${Q}_{\textit {un}}{)}$
mentioned in the Abstract,
Fig. 3(a)
,
Table I
, and discussion associated with
Fig. 3(a)
and
Table I
. The frequency response of impedance is derived from the measured scattering (S) parameters.
${Q}_{\textit {un}}$
of the MEMS resonator should be deduced by converting the measured loaded quality factor (
${Q}_{l}$
) from the S parameters using the approach described in
[2]
. However, we misused the quality factor (
${Q}$
) derived from the converted impedance results, rather than that from the S parameters. We sincerely regret the error in our original letter.
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关键词
Temperature-stable,low impedance,microelectromechanical system (MEMS) resonator,piezoelectric,temperature compensated crystal oscillator (TCXO),passive temperature compensation
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