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Corrections to “A Temperature-Stable and Low Impedance Piezoelectric MEMS Resonator for Drop-in Replacement of Quartz Crystals” [Sep 21 1382-1385]

IEEE Electron Device Letters(2022)

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摘要
In the above letter [1] , the authors would like to correct an error regarding the deduction of the unloaded quality factor ( ${Q}_{\textit {un}}{)}$ mentioned in the Abstract, Fig. 3(a) , Table I , and discussion associated with Fig. 3(a) and Table I . The frequency response of impedance is derived from the measured scattering (S) parameters. ${Q}_{\textit {un}}$ of the MEMS resonator should be deduced by converting the measured loaded quality factor ( ${Q}_{l}$ ) from the S parameters using the approach described in [2] . However, we misused the quality factor ( ${Q}$ ) derived from the converted impedance results, rather than that from the S parameters. We sincerely regret the error in our original letter.
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关键词
Temperature-stable,low impedance,microelectromechanical system (MEMS) resonator,piezoelectric,temperature compensated crystal oscillator (TCXO),passive temperature compensation
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