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A PMUT Transceiver Front-End with 100-V TX Driver and Low-Noise Voltage Amplifier in BCD-SOI Technology

ESSCIRC 2022- IEEE 48th European Solid State Circuits Conference (ESSCIRC)(2022)

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Abstract
This paper presents an analog transceiver for PMUT-based portable ultrasound medical imaging probes, working in the 2–4 MHz frequency range. The transceiver, fabricated in a 160-nm BCD-SOI technology, delivers a three-level train of pulses with amplitude up to ±50 V to the ultrasound transducer and collects the back-scattered echoes with a receiver chain, consisting of a low-noise voltage amplifier with programmable gain and a buffer. The circuit, connected to a PMUT, achieves a RX sensitivity of 50 mV/kPa at minimum gain and an input-referred noise spectral density of $13\,\text{nV}/\sqrt{Hz}$ at 2.3 MHz, consuming 5.4 mW. The peak RX sensitivity, obtained with acoustic measurements in a water tank, is 50 mV/kPa at 2.3 MHz.
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Key words
100-V TX driver,low-noise voltage amplifier,analog transceiver,PMUT-based portable ultrasound medical imaging probes,160-nm BCD-SOI technology,ultrasound transducer,input-referred noise spectral density,PMUT transceiver front-end,back-scattered echoes,receiver chain,programmable gain,acoustic measurements,water tank,frequency 2.0 MHz to 4.0 MHz,power 5.4 mW,size 160 nm
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