Monte Carlo worst case analysis of atom probe tomography microelectrode

2017 International Applied Computational Electromagnetics Society Symposium (ACES)(2017)

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摘要
The electrode constitutes the key element of the atom probe (AP) pulse signal generator. The AP parameter Monte Carlo (MC) analysis is introduced. The AP microelectrode is designed with 50-Ω loaded microstrip line centered by via hole. The excitation square wave pulse presents 300-ps duration and 1-kV amplitude. The worst cases of the signal integrity is performed with MC analysis applied to the electrode transmission line metallization width sensitivity. Computation results with commercial frequency analysis from DC to 10-GHz is presented. The worst-case analysis is necessary for the AP performance optimization by increasing the radiated pulsed electric-field.
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关键词
Atom Probe Tomography,Monte Carlo,Worst Case,Signal integrity
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