Inverse-Designed Dual Layer c-Si/SiN Vertical Grating Couplers Tested on 300mm Wafers

Sean Hooten,Mudit Jain,Thomas Van Vaerenbergh,Peng Sun,Quentin Wilmart,Ashkan Seyedi,Zhihong Huang,Marco Fiorentino,Raymond G. Beausoleil

Photonics in Switching and Computing (PSC)（2022）

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摘要

We experimentally demonstrate record low median insertion loss (1.3 dB, O-band) in 0° single-polarization grating couplers consisting of a single-etch c-Si layer with a patterned SiN overlay, fabricated with 193nm DUV immersion lithography on 300mm wafers.

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关键词

c-si/sin vertical grating couplers,inverse-designed

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