Polymer ring-resonator on a slotted membrane for ultrasound imaging

Ring resonators have been vastly considered to address the demand for future needs of smaller miniature array to reach compact and more sensitive ultrasound detectors. In this work we proposed a novel mechanically induced high sensitivity for a ring on an slotted membrane with relatively low-cost polymer material, roll to roll manufacturing ability, and less temperature-sensitivity. The results showing a 50 % sensitivity increase on the most sensitive device structure on simple membrane which has been reported. We also proposed its fabrication method by two-step nano-imprint lithography followed by AFM tip to make the slots on the membrane. This device could add benefits of early diseases detection in ultrasound biomedical imaging. Also, in a combination of an array with other ring resonators can cover larger dynamic range and frequency bandwidth.