Optical method for homogeneity testing of thin films electrodes for photovoltaic cells

The new non-destructive, optical method for homogeneity of photovoltaic cells testing is presented. The uniformity of thickness and optical constants of the deposited large area electrodes (15.6*15.6 cm*cm) were measured by spectroscopic ellipsometry. The sputtering deposition equipment for metallic electrodes (Al, Mo) was designed and run. The ALD equipment was used for transparent electrodes deposition (ZnO:Al). Description of vacuum deposition systems as well as tests resultants are presented.