Ge-based Mid-infrared integrated photonics platform for Sensing

2022 Device Research Conference (DRC)(2022)

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Abstract
Mid-infrared (Mid- IR) wavelength has been regarded as fingerprints for various gases, molecules, etc, motivating the development of the photonic on-chip sensors working at this spectral range. However, fabricating on-chip sensors at this wavelength has been very challenging due to the absence of the integrated photonics platform, whereas many potential platforms have been suggested and demonstrated. Furthermore, there have been not many technological options for the detector operating at room temperature because typical photon detectors suffer from thermal noise due to small photon energy at the Mid-IR wavelength.
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Key words
photon energy,photon detectors,photonic on-chip sensors,Ge-based midinfrared integrated photonics platform,thermal noise,Ge slot waveguide,confinement factor,passive sensing waveguide,figure-of-merit,waveguide bolometric detector,SOI platform,temperature 293.0 K to 298.0 K,Ge
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