Opportunity of Metallic Glass in Soft Electronics
2019 IEEE International Conference on Flexible and Printable Sensors and Systems (FLEPS)(2019)
Abstract
The Metallic glass which is having no crystal structure, can be adopted for enhance strength and a lower Young's modulus. Unlike crystalline metals, metallic glass can be used as an electrode in flexible, soft electronics. The external energy causes structural deformations in the metal with lattice structure, while a metallic glass disperses the energy. Therefore, the limitations of crystalline metals can be overcome by the metallic glass. However, void structure can be easily formed inside of the metal with Thornton's model. To eliminate the porosity, we were able to control the sputtering condition of metal atoms and ions. Elastic modulus of 76.6GPa and a strength of 2.88GPa was achieved by optimized Fe
33
Zr
67
which has an amorphous structure. With this metallic glass, we fabricated a multi-functional sensor for electronic skin that can detect stimuli of pressure, temperature and light and also function as a heater. In this paper, we convinced the feasibility of the Fe
33
Zr
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metallic glass in soft electronics for various industrial applications.
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Key words
metallic glass thin film,Young's modulus,electrodes,structural deformations,lattice structure,void structure,Thornton's model,porosity,sputtering condition,elastic modulus,amorphous structure,multifunctional sensor,pressure sensors,temperature sensors,photo sensor,heater,crystalline metals,soft electronics,Fe33Zr67
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