Machine-learning-based automatic small-angle measurement between planar surfaces in interferometer images: A 2D multilayer Laue lenses case
Optics and Lasers in Engineering(2023)
摘要
•A machine-learning-based method is developed to automatically measure the small angle between multiple planar surfaces in an interferometer image.•This easy-to-use and accurate method significantly simplifies the angle measurement procedure and is compatible with widely used white light interferometers.•The new method is demonstrated for a quick and precise angle measurement for the alignment of 2D multilayer Laue lenses for developing high-resolution x-ray microscopy.
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关键词
Optical Interferometer,Optical Image,Machine Learning,Multilayer Laue Lenses,Optics,X-ray
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