Vacuum Control Measurement System for Mass Spectrometer

This paper presents a novel system for vacuum control measurement of Mass spectrometer, which consists of three main parts: Vacuum gauges sensor, analog signal and digital signal processing circuits and PC software. It can measure and record the pressure of vacuum signal from different parts of the mass spectrometer by the Pirani vacuum gauge which measures low vacuum pressure and the Penning vacuum gauge which measures the high vacuum pressure, the system can judge the valve from Pirani vacuum gauge and decide if it is suitable to power on/off the turbo pump, and the data from both gauges can be transferred to the PC, and display by the software. Finally, after experiments, the feasibility and reliability of the system is validated.