Determination of thermal diffusivity of thin films by applying Fourier expansion analysis to thermo-reflectance signal after periodic pulse heating
JOURNAL OF APPLIED PHYSICS(2021)
摘要
The flash methods, which are the most popular transient methods for measuring the thermal diffusivity of solid materials, have evolved into ultrafast laser flash methods by using picosecond or nanosecond pulse lasers as a heating source and a thermo-reflectance technique such as high-speed thermometry. In conventional ultrafast laser flash methods, thermal diffusivity is determined by fitting an analytical equation after single pulse heating to observe thermo-reflectance signals, although actual thermo-reflectance signals are observed after periodic pulse heating. This paper presents an exact analytical solution of the temperature response expressed by Fourier series for one-dimensional heat diffusion after periodic pulse heating. These Fourier coefficients are directly related to the Laplace transformation of the temperature response after single pulse heating. The signal observed for a 100 nm thick platinum thin film on a fused quartz substrate was analyzed by this Fourier expansion analysis and fitted by analytical equations with three parameters: heat diffusion time across thin film, the ratio of heat effusion of the substrate to thin film, and the amplitude of the signal over the entire range of pulse interval in the time domain. Robustness in determining the thermal diffusivity of the thin film by the ultrafast laser flash method can be improved by this new analysis approach. (C) 2021 Author(s).
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关键词
thermal diffusivity,periodic pulse heating,thin films,thermo-reflectance
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