Imaging of buried overlay and alignment markers using picosecond acoustic microscopy

Manjusha Mehendale, Andy Antonelli, Robin Mair, Priya Mukundhan,Janusz Bogdanowicz,Victor Blanco, Anne-Laure Charley,Philippe Leray

METROLOGY, INSPECTION, AND PROCESS CONTROL XXXVI（2022）

引用 0|浏览4

暂无评分

摘要

Optically opaque materials present a series of challenges for alignment and overlay in the lithography process flow. We demonstrate the efficacy of picosecond acoustic microscopy (PAM) in generating 2D lateral images of structures embedded under opaque layers, including the potential of PAM to generate 3D images by analyzing scanned z planes.

查看译文

关键词

Picosecond Acoustic Microscopy (PAM), Picosecond Laser Acoustics (PLA), Alignment and overlay target

AI 理解论文

溯源树

样例

生成溯源树，研究论文发展脉络

Chat Paper

正在生成论文摘要