Enhanced mechanical properties of CrN coatings by plasma immersion ion implantation and deposition
Ceramics International(2023)
摘要
Crystal defects can enhance the properties of materials without changing the composition but introduction of high-density defects in coatings is challenging. Herein, plasma immersion ion implantation and deposition (PIII&D) is employed to produce high-density crystal defects in CrN coatings to improve the mechanical properties. PIII&D is demonstrated to introduce high-density point defects and stacking faults into the CrN coatings, especially at a bias exceeding 10 kV. The dislocation density significantly increased from 5.2 x 1014/m2 to 1.3 x 1017/m2. In addition, the covered area of defects increased from 30% to 75% with the ion implantation. As a result, the hardness increases significantly from 24.2 GPa to 35.6 GPa, while the fracture toughness is not compromised.
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关键词
Crystal defects,Ion energy,CrN coatings,Mechanical properties,Plasma immersion ion implantation and,deposition,PIII&D
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