Developing a Si Micromachined Module for a 2 THz Schottky Receiver

C.P. Chen,C. Jung-Kubiak,R. Lin,D. Hayton,A. Maestrini,J. Siles,C. Lee,A. Peralta,I. Mehdi

2022 47th International Conference on Infrared, Millimeter and Terahertz Waves (IRMMW-THz)（2022）

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Abstract

Space instruments to perform measurements in the THz range can provide unique insight into the chemical and physical processes in space, motivating the need to develop key technology components to support this frequency domain. Development of a 2.06 THz receiver, used for the purposes of detecting the ionized oxygen (OI) line, is detailed here, including the process of its design, fabrication, and integration with an advanced local oscillator (LO) chain to support subharmonic mixing.

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Key words

space instruments,physical processes,frequency domain,ionized oxygen line,si micromachined module,schottky receiver,chemical process,advanced local oscillator chain,subharmonic mixing,frequency 2.0 THz,frequency 2.06 THz,Si

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