Development of a Transparent Cryogenic Probe Card Based on Silicon Carbide

Ryan Beazer, Jared Payne, Gregory N. Nielson, Rebecca Anderson, Madeline Thompson, Topher Johnson, Brad Ferguson, Stephen Schultz

2022 Intermountain Engineering, Technology and Computing (IETC)（2022）

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摘要

This work provides an overview of a silicon carbide-based cryogenic probe card, a device for small-circuit verification and assessment. Both a compact orthoplanar and a fixed-fixed beam design are discussed. The accompanying printed circuit board device is examined. Simulation results verify the feasibility of the presented designs.

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关键词

Silicon Carbide,Probe Card,Cryogenic

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