Large scale programmable photonic circuits using silicon photonic MEMS

Umar Khan,Iman Zand,Pierre Edinger,Gaehun Jo,Simon J. Bleiker,Alain Yuji Takabayashi,Cleitus Antony,Junsu Lee, Arun Kumar Malik,Peter Verheyen,Cristina Lerma Arce,Tigers Jonuzi,Jan Watte,Niels Quack,Frank Niklaus,Kristinn B. Gylfason,Wim Bogaerts

2022 Conference on Lasers and Electro-Optics (CLEO)（2022）

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摘要

We demonstrate low-power and non-volatile MEMS actuators on an industrially established silicon photonics platform. The compact electrostatically actuated phase shifters and tunable couplers enable large-scale programmable photonic integrated circuits.

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