Near-Infrared Graphene/4H-SiC Schottky Photodetectors

2022 17th Conference on Ph.D Research in Microelectronics and Electronics (PRIME)(2022)

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摘要
Silicon Carbide (SiC), with its superior electronic properties, is recognized as one of the most promising candidates for the new generation of optoelectronic devices. In the present work, a preliminary study about a graphene/4H-SiC Schottky junction photodiode operating in the near-infrared (NIR) spectral range was performed. In particular, we report about the fabrication and the electro-optical characterization of the first - to the best of our knowledge - graphene/4H-SiC-based Schottky near-infrared photodetector. Ten devices, with the same geometry, were electrically characterized, the I-V plot shows a good rectifying behavior, with a series resistance of 60±23 Ω, an ideality factor of 7±1, and a zero-bias Schottky barrier height of 0.55±0.05 eV. Concerning the optical characterization, it was performed at the wavelength of λ=785 nm, which is far away from the absorption edge of the used wide bandgap semiconductor. The maximum internal responsivity without bias-voltage was evaluated as 0.12 mA/W. Even if the measured responsivity is still limited, we believe that this device can pave the way to investigations on near-infrared Schottky photodetectors based on graphene/4H-SiC junctions, useful for communications at the common fiber optic wavelengths.
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关键词
Photodetector,Graphene,Silicon Carbide,Near-Infrared
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