Flexible, Process-Aware Compact Model of Effective Index in Silicon Waveguides for Commercial Foundries

Aneek James,Yuyang Wang,Anthony Rizzo,Keren Bergman

2022 International Conference on Numerical Simulation of Optoelectronic Devices (NUSOD)（2022）

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摘要

We report the performance of a compact model for the effective index of SOI wire waveguides, showing exceptional agreement with simulated effective index and confinement factors. The development of such a model represents a potential pathway toward better modeling of silicon photonic devices in commercial foundry processes.

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关键词

process-aware compact model,silicon waveguides,commercial foundries,SOI wire waveguides,exceptional agreement,simulated effective index,silicon photonic devices,commercial foundry processes

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