Synthesis and characterization of sputter-deposited Ni-rich Ni3Al hard coatings

Ni3Al and Nickel (Ni) rich Ni3Al thin films were deposited on Si (100) substrate by magnetron sputtering and co-sputtering process respectively. Variations in elemental composition, microstructure, surface topography, and mechanical properties were investigated as a function of Ni enrichment via EDS, SEM, AFM, and nanoindentation respectively. Results revealed that the hardness and young’s modulus decrease with increase in Ni content in the film. A maximum hardness of 12.75 GPa was achieved with the elemental composition of Al (20.8 at%) and Ni (79.2 at%). The increase in surface roughness as a result of Ni enrichment led to the increase in hydrophobic properties up to the elemental composition of Al (14.9 at%) and Ni (85.1 at%) beyond which it declined. This study shows that the surface roughness, microstructure, and elemental composition influence the mechanical and hydrophobic properties of the Nickel rich Ni3Al coatings.