The Accelerometer Utilizing the Transverse Vibration Mode of LGT Piezoelectric Crystal
2019 13th Symposium on Piezoelectrcity, Acoustic Waves and Device Applications (SPAWDA)(2019)
摘要
A transverse-vibration-mode piezoelectric accelerometer using La
3
Ga
5.5
Ta
0.5
O
14
(LGT) single crystal was designed and fabricated for potential high temperature sensing applications. Dynamic modeling of the accelerometer based on the transverse-vibration-mode of LGT crystal was presented first, followed by crystal cut preparation, sensor design and assembly, experimental setup establishment and sensing test. The prototype of transverse-vibration-mode piezoelectric accelerometer was tested in the temperature range of 20°C~350°C under 160Hz. The average sensitivity of the prototype was evaluated to be 3.3 pC/g over the tested temperature range and the linearity reached 1.2%. This work might supply an approach for design and fabrication of new piezoelectric accelerometers using the transverse-vibration-mode of piezoelectric crystal materials.
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关键词
LGT crystal,Piezoelectric accelerometer,Transverse-vibration-mode
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