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Oxygen and Hydrogen Sorption in Thermally Activated Yttrium-Based Getter Thin Films for MEMS Vacuum Packaging

Charlotte Kutyla,Sylvain Lemettre,Clement Bessouet,Philippe Coste,Thierry Sauvage,Alain Bosseboeuf,Aurelien Bellamy,Piyush Jagtap,Olivier Wendling,Christophe Guichet,Olivier Thomas,Stephanie Escoubas,Johan Moulin

2022 SYMPOSIUM ON DESIGN, TEST, INTEGRATION AND PACKAGING OF MEMS/MOEMS, DTIP（2022）

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Key words
Yttrium alloys,oxidation,getter,thin films,low-temperature bonding
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