Silicon rich silicon nitride for efficient thermo-optic switches

Hani Nejadriahi, S.A. Pappert,Yeshaiahu Fainman,Paul K. L. Yu

OSA Advanced Photonics Congress 2021（2021）

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摘要

We demonstrate low loss ultra-compact bends in PECVD silicon rich silicon nitride and utilize them towards realizing efficient thermo-optic MMI switches with P π = 23 mW and a footprint of 68 x 68 µm 2 .

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