Multispecies analysis in a CH4/N2 discharge plasma using a mid-infrared supercontinuum source and an FTS

N. Liu,R. Krebbers,M. A. Abbas,Amir Khodabakhsh,Mohammadreza Nematollahi,Khalil Eslami Jahromi,Frans J. M. Harren

OSA Optical Sensors and Sensing Congress 2021 (AIS, FTS, HISE, SENSORS, ES)（2021）

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摘要

A Fourier transform spectrometer (FTS), equipped with a broadband MIR supercontinuum (SC) source, is developed for analyzing CH 4 /N 2 discharge plasma and the kinetics of plasma products (typically C 2 H 6 and HCN) under different discharge currents.

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关键词

ch4/n2 discharge plasma,mid-infrared

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