A Straightforward Method for Measuring the Elastic and Inelastic Mean Free Paths for Scattering of Fast Electrons in Technologically Important Thin-Film Oxides

Journal Article A Straightforward Method for Measuring the Elastic and Inelastic Mean Free Paths for Scattering of Fast Electrons in Technologically Important Thin-Film Oxides Get access Adham Basha, Adham Basha Department of Materials Science and Engineering, The Iby and Aladar Fleischman Faculty of Engineering, Tel Aviv University, Ramat Aviv, Tel Aviv, Israel Search for other works by this author on: Oxford Academic Google Scholar George Levi, George Levi Department of Materials Science and Engineering, The Iby and Aladar Fleischman Faculty of Engineering, Tel Aviv University, Ramat Aviv, Tel Aviv, Israel Search for other works by this author on: Oxford Academic Google Scholar Tamir Amrani, Tamir Amrani Department of Materials Science and Engineering, The Iby and Aladar Fleischman Faculty of Engineering, Tel Aviv University, Ramat Aviv, Tel Aviv, Israel Search for other works by this author on: Oxford Academic Google Scholar Yang Li, Yang Li Andrew and Erna Viterbi Faculty of Electrical and Computer Engineering, Technion – Israel Institute of Technology, Haifa, Israel Search for other works by this author on: Oxford Academic Google Scholar Guy Ankonina, Guy Ankonina Andrew and Erna Viterbi Faculty of Electrical and Computer Engineering, Technion – Israel Institute of Technology, Haifa, Israel Search for other works by this author on: Oxford Academic Google Scholar Pini Shekhter, Pini Shekhter Tel Aviv University Center for Nanoscience and Nanotechnology, Tel Aviv University, Ramat Aviv, Tel Aviv, Israel Search for other works by this author on: Oxford Academic Google Scholar Lior Kornblum, Lior Kornblum Andrew and Erna Viterbi Faculty of Electrical and Computer Engineering, Technion – Israel Institute of Technology, Haifa, Israel Search for other works by this author on: Oxford Academic Google Scholar Ilan Goldfarb, Ilan Goldfarb Department of Materials Science and Engineering, The Iby and Aladar Fleischman Faculty of Engineering, Tel Aviv University, Ramat Aviv, Tel Aviv, Israel Search for other works by this author on: Oxford Academic Google Scholar Amit Kohn Amit Kohn Department of Materials Science and Engineering, The Iby and Aladar Fleischman Faculty of Engineering, Tel Aviv University, Ramat Aviv, Tel Aviv, Israel Corresponding author: akohn@tauex.tau.ac.il Search for other works by this author on: Oxford Academic Google Scholar Microscopy and Microanalysis, Volume 28, Issue S1, 1 August 2022, Pages 774–778, https://doi.org/10.1017/S143192762200352X Published: 01 August 2022