Combining Atomic-Scale EDX with Inelastic Multislice Simulations for Quantitative Chemical Analysis of AlGaN/GaN 1 nm-thick Quantum Wells

Journal Article Combining Atomic-Scale EDX with Inelastic Multislice Simulations for Quantitative Chemical Analysis of AlGaN/GaN 1 nm-thick Quantum Wells Get access Florian Castioni, Florian Castioni Univ. Grenoble Alpes, CEA, LETI, Grenoble, France Corresponding author: florian.castioni@cea.fr Search for other works by this author on: Oxford Academic Google Scholar Sergi Cuesta, Sergi Cuesta Univ. Grenoble Alpes, CEA, IRIG, Grenoble, France Search for other works by this author on: Oxford Academic Google Scholar Nicolas Bernier, Nicolas Bernier Univ. Grenoble Alpes, CEA, LETI, Grenoble, France Search for other works by this author on: Oxford Academic Google Scholar Patrick Quéméré, Patrick Quéméré Univ. Grenoble Alpes, CEA, LETI, Grenoble, France Search for other works by this author on: Oxford Academic Google Scholar Eric Robin, Eric Robin Univ. Grenoble Alpes, CEA, IRIG, Grenoble, France Search for other works by this author on: Oxford Academic Google Scholar Vincent Delaye, Vincent Delaye Univ. Grenoble Alpes, CEA, LETI, Grenoble, France Search for other works by this author on: Oxford Academic Google Scholar Eva Monroy, Eva Monroy Univ. Grenoble Alpes, CEA, IRIG, Grenoble, France Search for other works by this author on: Oxford Academic Google Scholar Pascale Bayle-Guillemaud Pascale Bayle-Guillemaud Univ. Grenoble Alpes, CEA, IRIG, Grenoble, France Search for other works by this author on: Oxford Academic Google Scholar Microscopy and Microanalysis, Volume 28, Issue S1, 1 August 2022, Pages 2564–2566, https://doi.org/10.1017/S1431927622009771 Published: 01 August 2022