Local Stress Measurements in Microelectronic Devices Using HREBSD

Microscopy and Microanalysis（2022）

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Journal Article Local Stress Measurements in Microelectronic Devices Using HREBSD Get access TJ Ruggles TJ Ruggles Sandia National Laboratories, Material, Physical, and Chemical Sciences Center, Albuquerque, NM Corresponding author: truggle@sandia.gov Search for other works by this author on: Oxford Academic Google Scholar Microscopy and Microanalysis, Volume 28, Issue S1, 1 August 2022, Pages 578–579, https://doi.org/10.1017/S1431927622002896 Published: 01 August 2022

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