Toward controlling the Al2O3/ZnO interface properties by in situ ALD preparation
Dalton Transactions(2022)
Abstract
The electronic band alignment of an alumina/zinc oxide thin-film heterostructure solely grown by atomic layer deposition has been determined by XPS/UPS depth profiling, correlating the electronic properties with the interface chemical composition.
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Key words
ald preparation,al<sub>2</sub>o<sub>3</sub>/zno,interface
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