Photonic circuits monolithically integrated with silicon photodiodes

We report the realization of an Electronic-Photonic Integrated Circuit. We developed a monolithic process in which a photonic circuit is realized on top of silicon detectors, realized in the epitaxial substrate. Expoliting wedge technology, we developed two coupling methods to send the 850nm optical signal into the detectors. Ultimately, the same technology can be used to realize avalanche photodiodes operating in Geiger mode to acquire single photon resolving capability.