Post Fabrication Permanent Laser Trimming of Silicon Nitride Photonic Devices
2019 IEEE 2nd British and Irish Conference on Optics and Photonics (BICOP)(2019)
摘要
We demonstrated the possibility of trimming the operating wavelength of nitrogen-rich silicon nitride racetrack resonators by exposing the devices to an ultraviolet laser. The results revealed that in a few seconds only, the resonant wavelength of fabricated devices could be tuned to any point within a free spectral range. This technique can also be applied to trim the response of any other silicon photonic device based on nitrogen-rich silicon nitride.
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关键词
silicon photonics,optical resonators,silicon nitride,nitrogen rich silicon nitride
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