Deformation field mapping of the X-ray silicon Fresnel Zone Plate

The characterization of the deformations of the circular Fresnel Zone Plate (FZP) by the X-ray diffraction imaging technique is presented in this paper. The research was performed at the ID06 ESRF beamline using the 12.38 keV radiation energy. During the experiment, the contour map of the FZP deformation field was obtained. This map was used in the reconstruction of the surface curvature profile at three points: at the FZP center, 60 μm, and 120 μm below the FZP center. As result, the FZP with 242 zones has a concave profile in its center and a convex profile near the outermost zones. The inflection points close to the 115th zone were observed. This technique can be used not only for the characterization of the conventional binary FZP but also for the Multilayer Laue Lenses and FZP with multilevel, and kinoform profiles.