Experimental optical and structural properties of ZnS, MgF2, Ta2O5, Al2O3 and TiO2 deposited by electron beam evaporation for optimum anti-reflective coating designs

Brian Li,Mercedes Gabás,Efraín Ochoa-Martínez, Víctor González de la Cruz, Mari Cruz López-Escalante,Laura León-Reina, Rafael Peña,Pilar García-Díaz,Iván García,Carlos Algora

Solar Energy（2022）

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摘要

•MgF2, ZnS, Ta2O5, Al2O3 and TiO2 refractive indexes as a function of thickness.•Ta2O5, Al2O3 and TiO2 refractive indexes as a function of O2 flow.•Refractive indexes validated against experimental reflectance and transmitance data.•Impact on the optimization of ARC thicknesses for III-V multijunction solar cells.

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关键词

Anti-reflective coatings,Multijunction solar cells,Spectroscopic ellipsometry,Electron-beam evaporation

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