Synaptic behavior in ferroelectric epitaxial rhombohedral Hf0.5Zr0.5O2 thin films

Neuromorphic Computing and Engineering(2022)

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摘要
Abstract The discovery of ferroelectricity in HfO2-based thin films brings tremendous opportunities for emerging ferroelectric memories as well as for synaptic devices. The origin of ferroelectricity in this material is widely attributed to the presence of a polar orthorhombic phase. However, a new ferroelectric rhombohedral phase displaying large polarization with no need of precycling, has more recently been reported in epitaxial Hf0.5Zr0.5O2 (HZO). In this work, the switching mechanism of the rhombohedral phase of HZO films is characterized by a two-stage process. In addition, the synaptic behaviour of this phase is presented, comparing it with previous reports on orthorhombic or non-epitaxial films. Unexpected similarities have been found between these structurally distinct systems. Even though the epitaxial films present a larger coercive field, the ration between the activation field for intrinsic polarization switching and the coercive field (Fa/Ec ) has been found to be close to 2, in agreement with that reported for other hafnia samples. This is about 5 times smaller than in most other ferroelectrics, confirming this characteristic as a unique feature of hafnia-based ferroelectrics.
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