V-shaped and Z-shaped SU-8 Micro-Tweezers with In-plane Displacement for Micromanipulation
2019 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS)(2019)
摘要
This paper presents the design, simulation, measurements, and experimental testing results of two micro-tweezers fabricated using SU-8 polymer as structural material. The micro-tweezers are electro-thermally actuated with a V-shaped and Z-shaped actuator, respectively. The micro-tweezers are in the normally closed mode operation. The structures were simulated using the finite element method within Coventorware software in order to determine their electro-thermo-mechanical behaviors. Electro-thermo-mechanical measurements and characterizations have been performed to determine the openings and the temperature distribution in the micro-tweezers as a function of electrical current. The measurements show a maximum in-plane opening of 61 μm between the tips of the V-shaped micro-tweezer at an electrical current of 53.7 mA while for the Z-shaped micro-tweezer an opening of 80 μm was obtained for at 54 mA. In both cases the out-of-plane deflection remains below 0.1 μm during actuation. A comparison between the simulations results and the measurements has been made. Functional tests were performed in order to prove the capability of the micro-tweezers by performing pick-and-placement operations to manipulate glass beads as the micro-objects.
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关键词
microtweezers,Z-shaped actuator,electro-thermo-mechanical behaviors,electro-thermo-mechanical measurements,microobjects,Z-shaped SU-8 microtweezers,V-shaped SU-8 microtweezers,in-plane displacement,micromanipulation,SU-8 polymer,Coventorware software,current 53.7 mA,size 80.0 mum,current 54.0 mA,size 0.1 mum
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