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Shaping the Topology of Thin-Film Structures via Selective Laser Ablation

R. V. Chkalov, D. G. Chkalova, D. A. Kochuev,K. S. Khorkov

Bulletin of the Russian Academy of Sciences: Physics（2022）

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Abstract
A study is performed of creating microsized elements of complex topology via the ablation of thin-film coatings with laser pulses. It is shown the precise controlled removal of material is possible through the formation of optical antenna interfaces. Ways of improving the technology of femtosecond laser micromachining are proposed.
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Key words
thin-film thin-film,laser,topology
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