Design and Simulation of Parallel Plate-Comb Type Mems Capacitive Accelerometer Using COMSOL

An overview on design of MEMS accelerometer involving parallel plate mechanical suspension is analysed. It is built using single-crystal isotropic silicon on the platform ‘COMSOL Multiphysics’. Stepwise analysis is performed to know the effect of structural parameters on Von Mises stress, displacement, eigenfrequency, change in capacitance and also frequency response bringing in the concept of finite element analysis (FEA) by considering g in the range of 0–500 m/s2. All the relations between capacitance and acceleration are interpreted by plotting a graph considering various values, and its application can be well defined in detecting mechanical properties efficiently.